Chalcogenide phase-change thin films used as grayscale photolithography materials

نویسندگان
چکیده

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Superconducting properties of iron chalcogenide thin films.

Iron chalcogenides, binary FeSe, FeTe and ternary FeTe x Se1-x , FeTe x S1-x and FeTe:O x , are the simplest compounds amongst the recently discovered iron-based superconductors. Thin films of iron chalcogenides present many attractive features that are covered in this review, such as: (i) easy fabrication and epitaxial growth on common single-crystal substrates; (ii) strong enhancement of supe...

متن کامل

Crystallization of Ge:Sb:Te Thin Films for Phase Change Memory Application

Chalcogenide glasses are a chemical compound consisting of at least one chalcogen element, sulphur, selenium, or tellurium, in combination with other elements. These glasses obtained great attention after discovery between 1962 and 1969 by Kolomiets, Eaton, Ovshinsky and Pearson of the S-shape current-voltage characteristic in chalcogenide glasses and the switching phenomenon from high to low r...

متن کامل

Bipolar switching in chalcogenide phase change memory

Phase change materials based on chalcogenides are key enabling technologies for optical storage, such as rewritable CD and DVD, and recently also electrical nonvolatile memory, named phase change memory (PCM). In a PCM, the amorphous or crystalline phase affects the material band structure, hence the device resistance. Although phase transformation is extremely fast and repeatable, the amorphou...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Optics Express

سال: 2014

ISSN: 1094-4087

DOI: 10.1364/oe.22.004973